000			01785nam a2200301 a 4500
008			120502r20042001nyua b 001 0 eng d
010			_a00051022
020			_a0195136055
040			_aDLC _cDLC _dDLC _dBD-KhUET
082	0	0	_a621.38152 _221
100	1		_aCampbell, Stephen A., _d1954-
245	1	4	_aThe science and engineering of microelectronic fabrication / _cStephen A. Campbell.
250			_a2nd ed.
260			_aNew York : _bOxford University Press, _cc2001 [reprinted 2004].
300			_axiv, 603 p. : _bill. ; _c24 cm.
490	0		_aThe Oxford series in electrical and computer engineering
504			_aIncludes bibliographical references and index.
650		0	_aSemiconductors _xDesign and construction.
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0610/00051022-d.html
856	4	1	_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0610/00051022-t.html
999			_c4826 _d4826
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