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|---|---|---|---|
| 008 | 120403s2004 nyua b 001 0 eng d | ||
| 010 | _a2003276248 | ||
| 020 | _a981253072X | ||
| 020 | _a0471232793 | ||
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_aUKM _cUKM _dHKP _dFUG _dDLC _dBD-KhUET |
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| 082 | 0 | 0 |
_a621.38152 _222 |
| 100 | 1 | _aMay, Gary S. | |
| 245 | 1 | 0 |
_aFundamentals of semiconductor fabrication / _cGary S. May, Simon M. Sze. |
| 250 | _aWiley student ed. | ||
| 260 |
_aNew York : _bWiley, _cc2004. |
||
| 300 |
_axiii, 305 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
| 700 | 1 |
_aSze, S. M., _d1936- |
|
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/bios/wiley044/2003276248.html |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley037/2003276248.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/wiley032/2003276248.html |
| 999 |
_c4262 _d4262 |
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