000 -LEADER |
fixed length control field |
01785nam a2200301 a 4500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
120502r20042001nyua b 001 0 eng d |
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
LC control number |
00051022 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
0195136055 |
040 ## - CATALOGING SOURCE |
Original cataloging agency |
DLC |
Transcribing agency |
DLC |
Modifying agency |
DLC |
-- |
BD-KhUET |
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
621.38152 |
Edition number |
21 |
100 1# - MAIN ENTRY--PERSONAL NAME |
Personal name |
Campbell, Stephen A., |
Dates associated with a name |
1954- |
245 14 - TITLE STATEMENT |
Title |
The science and engineering of microelectronic fabrication / |
Statement of responsibility, etc |
Stephen A. Campbell. |
250 ## - EDITION STATEMENT |
Edition statement |
2nd ed. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
Place of publication, distribution, etc |
New York : |
Name of publisher, distributor, etc |
Oxford University Press, |
Date of publication, distribution, etc |
c2001 [reprinted 2004]. |
300 ## - PHYSICAL DESCRIPTION |
Extent |
xiv, 603 p. : |
Other physical details |
ill. ; |
Dimensions |
24 cm. |
490 0# - SERIES STATEMENT |
Series statement |
The Oxford series in electrical and computer engineering |
504 ## - BIBLIOGRAPHY, ETC. NOTE |
Bibliography, etc |
Includes bibliographical references and index. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name as entry element |
Semiconductors |
General subdivision |
Design and construction. |
856 42 - ELECTRONIC LOCATION AND ACCESS |
Materials specified |
Publisher description |
Uniform Resource Identifier |
http://www.loc.gov/catdir/enhancements/fy0610/00051022-d.html |
856 41 - ELECTRONIC LOCATION AND ACCESS |
Materials specified |
Table of contents only |
Uniform Resource Identifier |
http://www.loc.gov/catdir/enhancements/fy0610/00051022-t.html |