Ruska, W. Scot
Microelectronic processing : an introduction to the manufacture of integrated circuits / W. Scot Ruska. - New York : McGraw-Hill, c1987. - xviii, 430 p. : ill. ; 25 cm. - McGraw-Hill series in electrical engineering .
Includes bibliographies and index.
0070542805 (text) 0070542813 (solutions manual) 0071002820
86015362
Integrated circuits--Design and construction.
621.38173
Microelectronic processing : an introduction to the manufacture of integrated circuits / W. Scot Ruska. - New York : McGraw-Hill, c1987. - xviii, 430 p. : ill. ; 25 cm. - McGraw-Hill series in electrical engineering .
Includes bibliographies and index.
0070542805 (text) 0070542813 (solutions manual) 0071002820
86015362
Integrated circuits--Design and construction.
621.38173