May, Gary S.
Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze. - Wiley student ed. - New York : Wiley, c2004. - xiii, 305 p. : ill. ; 24 cm.
Includes bibliographical references and index.
981253072X 0471232793
2003276248
Semiconductors--Design and construction.
Integrated circuits--Design and construction.
621.38152
Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze. - Wiley student ed. - New York : Wiley, c2004. - xiii, 305 p. : ill. ; 24 cm.
Includes bibliographical references and index.
981253072X 0471232793
2003276248
Semiconductors--Design and construction.
Integrated circuits--Design and construction.
621.38152